Professor Russell Gwilliam
Professor
Email: r.gwilliam@surrey.ac.uk
Phone: Work: 01483 68 9845
Room no: 16 NC 00
Further information
Publications
Highlights
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(2009) 'Enhancement of phosphorus activation in vacancy engineered thin silicon-on-insulator substrates'. AMER INST PHYSICS J APPL PHYS, 106 (10) Article number 103514 doi: 10.1063/1.3262527
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(2008) 'Evolution of vacancy-related defects upon annealing of ion-implanted germanium'. AMER PHYSICAL SOC PHYS REV B, 78 (8) Article number 085202 Full text is available at: http://epubs.surrey.ac.uk/240/
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(2007) 'Extraordinary optical gain from silicon implanted with erbium'. AMER INST PHYSICS APPL PHYS LETT, 91 (14) Article number 141122 doi: 10.1063/1.2797975Full text is available at: http://epubs.surrey.ac.uk/258/
Journal articles
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(2011) 'Role of heavy ion co-implantation and thermal spikes on the development of dislocation loops in nanoengineered silicon light emitting diodes'. AMER INST PHYSICS J APPL PHYS, 110 (3) Article number 033508 doi: 10.1063/1.3614036Full text is available at: http://epubs.surrey.ac.uk/7826/
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(2011) 'Self-interstitials injection in crystalline Ge induced by GeO2 nanoclusters'. AMER PHYSICAL SOC PHYS REV B, 84 (2) Article number 024104 Full text is available at: http://epubs.surrey.ac.uk/7827/
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(2011) 'The evolution of vacancy-type defects in silicon-on-insulator structures studied by positron annihilation spectroscopy'. AMER INST PHYSICS J APPL PHYS, 110 (1) Article number 016104 doi: 10.1063/1.3605487Full text is available at: http://epubs.surrey.ac.uk/7828/
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(2011) 'Laser erasable implanted gratings for integrated silicon photonics'. Optical Society of America Optics Express, 19 (11), pp. 10728-10734.doi: 10.1364/OE.19.010728Full text is available at: http://epubs.surrey.ac.uk/7086/
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(2011) 'Probing the phonon confinement in ultrasmall silicon nanocrystals reveals a size-dependent surface energy'. AMER INST PHYSICS J APPL PHYS, 109 (8) Article number 083534 doi: 10.1063/1.3575181Full text is available at: http://epubs.surrey.ac.uk/7825/
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(2011) 'Eye-safe 2 μm luminescence from thulium-doped silicon.'. Optical Society of America Opt Lett, United States: 36 (2), pp. 169-171.doi: 10.1364/OL.36.000169Full text is available at: http://epubs.surrey.ac.uk/7829/
- . (2011) 'Ion beam assisted crystallization of amorphous silicon layers using high current density Gallium beams'. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms,
- . (2011) 'Probing the formation of silicon nano-crystals (Si-ncs) using variable energy positron annihilation spectroscopy'. Journal of Physics: Conference Series, 262 (1)
- . (2011) 'Role of self-interstitials on B diffusion in Ge'. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms,
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(2010) 'Spatially correlated erbium and Si nanocrystals in coimplanted SiO2 after a single high temperature anneal'. AMER INST PHYSICS J APPL PHYS, 107 (4) Article number 044316 doi: 10.1063/1.3294645
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(2010) 'Modifying functionality of variable optical attenuator to signal monitoring through defect engineering'. INST ENGINEERING TECHNOLOGY-IET ELECTRON LETT, 46 (3), pp. 234-235.doi: 10.1049/el.2010.2785
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(2010) 'Effects of annealing silicon ion irradiated rib waveguides with respect to free carrier lifetime'. SPIE-INT SOC OPTICAL ENGINEERING SILICON PHOTONICS V, San Francisco, CA: 7606 Article number 76060H doi: 10.1117/12.838582
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(2010) 'Germanium implanted Bragg gratings in Silicon on Insulator waveguides'. SPIE-INT SOC OPTICAL ENGINEERING SILICON PHOTONICS V, San Francisco, CA: 7606 Article number 76060G doi: 10.1117/12.839502
- . (2010) 'Nano-engineered silicon light emitting diodes and optically active waveguides'. ELSEVIER SCIENCE BV OPTICAL MATERIALS, Herceg Novi, MONTENEGRO: 32 (12), pp. 1601-1605.
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(2010) 'Process characterization of low temperature ion implantation using ribbon beam and spot beam on the AIBT iPulsar high current'. AIP Conference Proceedings, 1321, pp. 49-52.doi: 10.1063/1.3548462
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(2010) 'Novel processing for Si-nanocrystal based photonic materials'. ECS Transactions, 28 (3), pp. 3-13.doi: 10.1149/1.3367207
- . (2010) 'Photoluminescence study of thulium-doped silicon substrates for light emitting diodes'. ELSEVIER SCIENCE BV OPTICAL MATERIALS, Herceg Novi, MONTENEGRO: 32 (12), pp. 1597-1600.
- . (2010) 'Structural and compositional study of Erbium-doped silicon nanocrystals by HAADF, EELS and HRTEM techniques in an aberration corrected STEM'. Journal of Physics: Conference Series, 209
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(2009) 'Enhancement of phosphorus activation in vacancy engineered thin silicon-on-insulator substrates'. AMER INST PHYSICS J APPL PHYS, 106 (10) Article number 103514 doi: 10.1063/1.3262527
- . (2009) 'Stressed solid-phase epitaxial growth of (011) Si'. MATERIALS RESEARCH SOC J MATER RES, 24 (2), pp. 305-309.
- . (2009) 'Simulation of electrical properties in ion implanted GaAs'. Physics Procedia, 2 (3), pp. 797-801.
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(2009) 'Free carrier lifetime modification in silicon'. SPIE-INT SOC OPTICAL ENGINEERING SILICON PHOTONICS IV, San Jose, CA: 7220 Article number 722006 doi: 10.1117/12.810907
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(2009) 'Structure and luminescence of rare earth-doped silicon oxides studied through XANES and XEOL'. ECS Transactions, 25 (9), pp. 213-222.doi: 10.1149/1.3211180
- . (2008) 'Differential Hall characterisation of ultrashallow doping in advanced Si-based materials'. ELSEVIER SCIENCE BV MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, Strasbourg, FRANCE: 154, pp. 229-233.
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(2008) 'Free carrier lifetime modification for silicon waveguide based devices'. OPTICAL SOC AMER OPT EXPRESS, 16 (24), pp. 19779-19784.doi: 10.1364/OE.16.019779Full text is available at: http://epubs.surrey.ac.uk/7092/
- . (2008) 'Enhanced n-type dopant solubility in tensile-strained Si'. ELSEVIER SCIENCE SA THIN SOLID FILMS, 517 (1), pp. 331-333.
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(2008) 'Evolution of vacancy-related defects upon annealing of ion-implanted germanium'. AMER PHYSICAL SOC PHYS REV B, 78 (8) Article number 085202 Full text is available at: http://epubs.surrey.ac.uk/240/
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(2008) 'Dopant-stress synergy in Si solid-phase epitaxy'. AMER INST PHYSICS APPL PHYS LETT, 92 (23) Article number 232110 doi: 10.1063/1.2945291
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(2008) 'Constraints on micro-Raman strain metrology for highly doped strained Si materials'. AMER INST PHYSICS APPL PHYS LETT, 92 (23) Article number 233506 doi: 10.1063/1.2942392Full text is available at: http://epubs.surrey.ac.uk/260/
- . (2008) 'Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon'. ELSEVIER SCIENCE SA MAT SCI ENG R, 61 (1-6), pp. 40-58.
- . (2008) 'Kinetics and morphological instabilities of stressed solid-solid phase transformations'. AMER PHYSICAL SOC PHYS REV LETT, 100 (16) Article number 165501
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(2008) 'Silicon light emitting diodes emitting over the 1.2-1.4 mu m wavelength region in the extended optical communication band'. AMER INST PHYSICS APPL PHYS LETT, 92 (16) Article number 161108 doi: 10.1063/1.2916824Full text is available at: http://epubs.surrey.ac.uk/428/
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(2008) 'Optical filters utilizing ion implanted Bragg gratings in SOI waveguides'. Hindawi Publishing Corporation Advances in Optical Technologies, 2008 Article number 276165 doi: 10.1155/2008/276165Full text is available at: http://epubs.surrey.ac.uk/7094/
- . (2008) 'Vacancy engineering - An ultra-low thermal budget method for high-concentration 'diffusionless' implantation doping'. Materials Science Forum, 573-574, pp. 295-304.
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(2008) 'Interaction of the end of range defect band with the upper buried oxide interface for B and BF2 implants in Si and silicon on insulator with and without preamorphizing implant'. A V S AMER INST PHYSICS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Napa, CA: 26 (1), pp. 347-350.doi: 10.1116/1.2816936
- . (2008) 'Differential Hall characterisation of ultrashallow doping in advanced Si-based materials'. ELSEVIER SCIENCE BV MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, Strasbourg, FRANCE: 154, pp. 229-233.
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(2008) 'Antimony for n-type metal oxide semiconductor ultrashallow junctions in strained Si: A superior dopant to arsenic?'. A V S AMER INST PHYSICS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Napa, CA: 26 (1), pp. 391-395.doi: 10.1116/1.2816929
- . (2007) 'A monolithic MQW InP-InGaAsP-Based optical comb generator'. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC IEEE J QUANTUM ELECT, 43 (11-12), pp. 998-1005.
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(2007) 'Solid phase epitaxy in uniaxially stressed (001) Si'. AMER INST PHYSICS APPL PHYS LETT, 91 (17) Article number 172103 doi: 10.1063/1.2801518
- . (2007) 'Considerations for interpretation of luminescence from silicon-on-insulator light emitting structures'. IOP PUBLISHING LTD SEMICOND SCI TECH, 22 (10), pp. 1104-1110.
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(2007) 'Extraordinary optical gain from silicon implanted with erbium'. AMER INST PHYSICS APPL PHYS LETT, 91 (14) Article number 141122 doi: 10.1063/1.2797975Full text is available at: http://epubs.surrey.ac.uk/258/
- . (2007) 'Fast tuneable InGaAsP DBR laser using quantum-confined stark-effect-induced refractive index change'. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC IEEE J SEL TOP QUANT, 13 (5), pp. 1112-1121.
- . (2007) 'Vacancy engineering for ultra-shallow junction formation'. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 261 (1-2 SPEC. ISS.), pp. 600-603.
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(2007) 'Novel fabrication techniques for silicon photonics'. SPIE-INT SOC OPTICAL ENGINEERING SILICON PHOTONICS II, San Jose, CA: 6477 Article number 64770E doi: 10.1117/12.705180
- . (2007) 'Photonic synthesis of THz signals'. Proceedings of the 36th European Microwave Conference, EuMC 2006, , pp. 1107-1110.
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(2006) 'Ultraviolet photoluminescence from Gd-implanted AlN epilayers'. AMER INST PHYSICS APPL PHYS LETT, 89 (15) Article number 152107 doi: 10.1063/1.2357552
- . (2006) 'Characterising ion-cut in GaAs by Rutherford backscattering spectroscopy'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Seville, SPAIN: 249, pp. 429-431.
- . (2006) 'Quality assurance in an implantation laboratory by high accuracy RBS'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Seville, SPAIN: 249, pp. 482-485.
- . (2006) 'Optimising dislocation-engineered silicon light-emitting diodes'. SPRINGER APPL PHYS B-LASERS O, 83 (2), pp. 289-294.
- . (2006) 'Signal stability in periodically amplified fiber transmission systems using multiple quantum well saturable absorbers for regeneration'. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC J LIGHTWAVE TECHNOL, 24 (2), pp. 747-754.
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(2006) 'Effect of Gd implantation on the structural and magnetic properties of GaN and AlN'. AMER INST PHYSICS APPL PHYS LETT, 88 (4) Article number 042102 doi: 10.1063/1.2167790
- . (2006) 'Understanding ion implantation defects in germanium'. ECS Transactions, 3 (2), pp. 67-76.
- . (2006) '10 Gb/s noise suppression using an ion implanted waveguide saturable absorber'. Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006,
- . (2006) 'Monolithically integrated QCSE-tuned InGaAsP MQW ridge waveguide DBR laser'. Conference Proceedings - International Conference on Indium Phosphide and Related Materials, 2006, pp. 72-74.
- . (2006) 'Enhanced antimony activation for ultra-shallow junctions in strained silicon'. Materials Research Society Symposium Proceedings, 912, pp. 59-64.
- . (2006) 'Chicane deceleration - An innovative energy contamination control technique in low energy ion implantation'. AIP Conference Proceedings, 866, pp. 335-339.
- . (2006) 'Junction stability of B doped layers in SOI formed with optimized vacancy engineering implants'. AIP Conference Proceedings, 866, pp. 84-87.
- . (2006) 'A monolithic MQW InP/InGaAsP-based comb generator'. 2006 International Topical Meeting on Microwave Photonics, MWP,
- . (2006) 'Strain-enhanced activation of Sb ultrashallow junctions'. AMER INST PHYSICS Ion Implantation Technology, Marseille, FRANCE: 866, pp. 54-57.
- . (2006) 'Ultra-shallow junction formation in SOI using vacancy engineering'. AMER INST PHYSICS Physics of Ionized Gases, Natl Park Kopaonik, SERBIA: 876, pp. 181-190.
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(2006) 'Vacancy-engineering implants for high boron activation in silicon on insulator'. Applied Physics Letters, 88 (8)Full text is available at: http://epubs.surrey.ac.uk/227/
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(2006) 'Highly conductive Sb-doped layers in strained Si'. AMER INST PHYSICS APPL PHYS LETT, 89 (18) Article number 182122 doi: 10.1063/1.2382741Full text is available at: http://epubs.surrey.ac.uk/126/
- . (2006) 'Shallow junctions in silicon via low thermal budget processing'. Extended Abstracts of the Sixth International Workshop on Junction Technology, IWJT '06, , pp. 10-15.
- . (2006) 'The effect of flash annealing on the electrical properties of indium/carbon Co-implants in silicon'. AIP Conference Proceedings, 866, pp. 113-116.
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(2005) 'Transition from amorphous to crystalline beta phase in co-sputtered FeSi2 films as a function of temperature'. AMER INST PHYSICS J APPL PHYS, 98 (12) Article number 123506 doi: 10.1063/1.2148629Full text is available at: http://epubs.surrey.ac.uk/464/
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(2005) 'Dislocation engineered silicon for light emission'. IEEE 2005 IEEE LEOS Annual Meeting Conference Proceedings (LEOS), Sydney, AUSTRALIA: , pp. 608-609.Full text is available at: http://epubs.surrey.ac.uk/1752/
Conference papers
- . (2011) 'Very low energy implanted Bragg gratings in SOI for wafer scale testing applications'. IEEE Proceedings of 8th IEEE International Conference on Group IV Photonics, London, UK: 8th IEEE GFP, pp. 51-53.
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(2011) 'Low energy silicon on insulator ion implanted gratings for optical wafer scale testing'. SPIE Proceedings of SPIE - The International Society for Optical Engineering, San Francisco, USA: Silicon Photonics VI 7943doi: 10.1117/12.873288Full text is available at: http://epubs.surrey.ac.uk/7822/
- . (2010) 'Luminescence of Tm3+in dislocation engineered silicon substrates'. Proceedings of 7th IEEE International Conference on Group IV Photonics, Beijing, China: 7th IEEE GFP, pp. 159-161.
- . (2010) '1.1 to 1.6 μm silicon light emitting diodes and optical gain'. Proceedings of IEEE 7th International Conference on Group IV Photonics GFP, Beijing, China: 7th IEEE GFP, pp. 302-304.
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(2010) 'Optimization and characterisation of amorphous iron disilicide formed by ion beam mixing of Fe/Si multilayer structures for photovoltaic applications'. AIP Conference Proceedings, Kyoto, Japan: Ion Implantation Technology 2101: 18th International Conference on Ion Implantation Technology IIT 2010 1321, pp. 278-281.doi: 10.1063/1.3548379
- . (2010) 'On artefacts in the secondary ion mass spectrometry profiling of high fluence H+ implants in GaAs'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Univ Cambridge, Cambridge, ENGLAND: 19th International Conference on Ion Beam Analysis 268 (11-12), pp. 2051-2055.
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(2010) 'Formation of Si-nanocrystals in SiO2 via ion implantation and rapid thermal processing'. Proceedings of SPIE - The International Society for Optical Engineering, San Francisco, USA: Silicon Photonics V 7606doi: 10.1117/12.852924
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(2010) 'Optical spectroscopy of Er doped Si-nanocrystals on sapphire substrates fabricated by ion implantation into SiO2'. Proceedings of SPIE - The International Society for Optical Engineering, San Francisco, USA: Silicon Photonics V 7606doi: 10.1117/12.852922
- . (2009) 'Observation of non-radiative de-excitation processes in silicon nanocrystals'. WILEY-V C H VERLAG GMBH PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, Edmonton, CANADA: 3rd International Conference on Optical, Optoelectronic and Photonic Materials and Applications 206 (5), pp. 969-972.
- . (2009) 'Silicon Carbide Static Induction Transistor with Implanted Buried Gate'. TRANS TECH PUBLICATIONS LTD SILICON CARBIDE AND RELATED MATERIALS 2008, Barcelona, SPAIN: 7th European Conference on Silicon Carbide and Related Materials 615-617, pp. 735-738.
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(2009) 'Silicon photonics at the University of Surrey'. Proceedings of SPIE - The International Society for Optical Engineering, Dresden, Germany: Photonic Materials, Devices, and Applications III 7366, pp. 736602.1-736602.12.doi: 10.1117/12.823291
- . (2008) 'Vacancy engineering for highly activated 'diffusionless' boron doping in bulk silicon'. Proceedings of the 38th European Solid-State Device Research Conference, Edinburgh, UK: ESSDERC 2008, pp. 290-293.
- . (2008) 'The effect of doping type and concentration on optical absorption via implantation induced defects in silicon-on-insulator waveguides'. Proceedings of Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD, Sydney, Australia: COMMAD 2008, pp. 152-155.
- . (2008) 'Microwave photonics: Opportunities for photonic integration'. Proceedings of the 14th European Conference on Integrated Optics and Technical Exhibition, Eindhoven, The Netherlands: ECIO'08, pp. 123-132.
- . (2008) 'Formation of dislocation loops in silicon by ion irradiation for silicon light emitting diodes'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Florence, ITALY: 9th European Conference on Accelerators in Applied Research and Technology 266 (10), pp. 2470-2474.
- . (2008) 'Free carrier lifetime modification for silicon waveguide based devices'. IEEE Proceedings of 5th IEEE International Conference on Group IV Photonics, Cardiff, UK: 5th IEEE GFP, pp. 122-124.
- . (2008) 'A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF2 Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant'. AMER INST PHYSICS ION IMPLANTATION TECHNOLOGY 2008, Monterey, CA: 17th International Conference on Ion Implantation Technology 1066, pp. 51-54.
- . (2008) 'Junction Leakage Analysis of Vacancy Engineered Ultra-Shallow p-type Layers'. AMER INST PHYSICS ION IMPLANTATION TECHNOLOGY 2008, Monterey, CA: 17th International Conference on Ion Implantation Technology 1066, pp. 22-25.
- . (2008) 'The Formation of Ultra-Shallow Phosphorous Doped Layers Using Vacancy Engineering'. AMER INST PHYSICS ION IMPLANTATION TECHNOLOGY 2008, Monterey, CA: 17th International Conference on Ion Implantation Technology 1066, pp. 38-41.
- . (2007) 'Depth profile analysis for MgB2 thin films, formed by B implantation in Mg ribbons using energetic ion backscatterings'. ELSEVIER SCIENCE BV PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, Dresden, GERMANY: 8th International Conference on Materials and Mechanisms of Superconductivity and High Temperature Superconductors 460, pp. 600-601.
- . (2007) 'Dislocation engineered silicon light emitting devices'. ELSEVIER SCIENCE SA THIN SOLID FILMS, Kyoto, JAPAN: Asia-Pacific Conference on Semiconducting Silicides 515 (22), pp. 8113-8117.
- . (2007) 'Maskless proton beam writing in gallium arsenide'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Singapore, SINGAPORE: 10th International Conference on Nuclear Microprobe Technology and Applications held in Conjunction with the 2nd International Workshop on Proton Beam Writing 260 (1), pp. 437-441.
- . (2007) 'Excitation and pressure effects on photoluminescence from dislocation engineered silicon material'. WILEY-V C H VERLAG GMBH PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, Barcelona, SPAIN: 12th International Conference on High Pressure Semiconductor Physics (HPSP-12) 244 (1), pp. 402-406.
- . (2006) 'Boron engineered dislocation loops for efficient room temperature silicon light emitting diodes'. ELSEVIER SCIENCE SA THIN SOLID FILMS, Singapore, SINGAPORE: 3rd International Conference on Materials for Advanced Technologies/9th International Conference on Advanced Materials 504 (1-2), pp. 36-40.
- . (2006) 'High-resolution DLTS of vacancy-donor pairs in P-, As- and Sb-doped silicon'. ELSEVIER SCIENCE BV PHYSICA B-CONDENSED MATTER, Awaji Isl, JAPAN: 23rd International Conference on Defects in Semiconductors 376, pp. 73-76.
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(2006) 'Nonconventional flash annealing on shallow indium implants in silicon'. A V S AMER INST PHYSICS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Daytona Beach, FL: 8th International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 24 (1), pp. 473-477.doi: 10.1116/1.2132321
- . (2006) 'Electrical profiles of 20 nm junctions in Sb implanted silicon'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Pacific Grove, CA: 14th International Conference on Ion Beam Modification of Materials (IBMM 2004) 242 (1-2), pp. 693-695.
- . (2006) 'Proton beam lithography at the University of Surrey's Ion Beam Centre'. ELSEVIER SCIENCE BV NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Pacific Grove, CA: 14th International Conference on Ion Beam Modification of Materials (IBMM 2004) 242 (1-2), pp. 387-389.
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(2005) 'Understanding, modeling and optimizing vacancy engineering for stable highly boron-doped ultrashallow junctions'. IEEE IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST, Washington, DC: IEEE International Electron Devices Meeting, pp. 989-992.Full text is available at: http://epubs.surrey.ac.uk/1218/

