SUSPRE

SUSPRE is a quick ion implantation calculator.

It is designed to calculate the implantation range profiles of any ion in any target material. It uses a numerical solution to the Boltzmann Transport Equation to create an approximate solution and is based on the Projected Range ALgorithm (PRAL - J.P.Biersack, Nucl. Instrum. Meths, 182/183, 199, (1981)).

SUSPRE calculates the energy deposited by the ions based on a model suggested by Gibbons (J.F.Gibbons: Proc. IEEE, 60(6), 1062, (1972)),  Fritzsche (C.R.Fritzsche: Appl. Phys., 12, 347, (1977)) and Webb (R.P.Webb, I.H.Wilson: Proc. 2nd Int. Conf. Simulation of Semiconductor Devices and Processes, eds K.Board and D.R.J.Owen, Pineridge Press, Swansea, U.K., (1986)). 

Sputtering yields are then calculated from the energy deposited in the surface region of the material using the Sigmund formula (P.Sigmund, Phys. Rev., 184, 383, (1969))

A zip file containing the installation can be downloaded from here.

Find out more.

Screen Shot of SUSPRE

SUSPRE screenshot (click to enlarge)

Page Owner: ees1rw
Page Created: Friday 3 December 2010 12:10:59 by ees1rw
Last Modified: Thursday 18 August 2011 17:01:51 by ees1rw
Expiry Date: Saturday 3 March 2012 12:01:37
Assembly date: Tue Jul 22 19:25:59 BST 2014
Content ID: 42834
Revision: 7
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