
Interactions of energetic particles
We have a long experience of modelling and simulation of energetic particle solid interactions. Ranging from the ion scattering to ion ranges in solids through sputtering and surface damage. We use both simple analytical models as well as more complex molecular dynamics techniques.
Resource
Ion implantation calculator
SUSPRE is a quick Ion implantation calculator. It is designed to calculate the implantation range profiles of any ion in any target material. It uses a numerical solution to the Boltzmann Transport Equation to create an approximate solution and is based on the Projected Range ALgorithm (PRAL - J.P.Biersack, Nucl. Instrum. Meths, 182/183, 199, (1981)).
SUSPRE calculates the energy deposited by the ions based on a model suggested by Gibbons (J.F.Gibbons: Proc. IEEE, 60(6), 1062, (1972)), Fritzsche (C.R.Fritzsche: Appl. Phys., 12, 347, (1977)) and Webb (R.P.Webb, I.H.Wilson: Proc. 2nd Int. Conf. Simulation of Semiconductor Devices and Processes, eds K.Board and D.R.J.Owen, Pineridge Press, Swansea, U.K., (1986)).
Sputtering yields are then calculated from the energy deposited in the surface region of the material using the Sigmund formula (P.Sigmund, Phys. Rev., 184, 383, (1969))
Download the zip file containing the installation.