News story

Prof Russell Mark Gwilliam Obituary

25 July 1957 - 29 July 2016.

It is with great sadness that we report the death of Russell Gwilliam.


Russell had been a key member of the Surrey University community for more than 30 years and was highly respected in his field, He played a pivotal role in driving forward world-class research at the Advanced Technology Institute and was a true inspiration to undergraduates, postgraduates and colleagues.


Russell Gwilliam was the Professor of Semiconductor Process Engineering and Director of Technology for Surrey Ion Beam Centre. He had over 30 years experience in the development of advanced semiconductor processes in materials including Si, III-Vs, II-VIs, SiC and diamond and was a founder and director of Si-Light Technologies Ltd.


He was also a regular invited speaker and chair at international conferences, he had over 350 publications and several patents in the field and built a large industrial clientele who routinely access the ion beam facilities for development and proof of concept programs through to pilot production and technology transfer to foundries. He was the UK representative on several International Conference Scientific Committees including the Ion Implantation Technology, the Ion Beam Modification of Materials and the Surface Modification of Materials with Ion Beams.


He had an international reputation in the field of ion-implantation and had a significant track record in the area of silicon photonics. He was a member of the IoP and the IET and carried C.Eng., C.Phys. and C.Sci.